Mechanical properties of thin films

High abrasion resistance and low stresses are key quality characteristics of thin layers. Comprehensive characterization of these properties is required to optimize the manufacturing process.

Solutions

• Stress testing of single layers on Si wafers, glasses and thin plastic substrates, also in relation to temperature using TENCOR® FLX2320
• Testing for scratch and abrasion resistance using the following methods:
• ABREX® chemical mechanical abrasion testing (e.g. DIN EN 60068-2-70 / IEC 68-2-70)
• Eraser test in accordance with ISO 9211-4
• Scanning scratch test with SST101 (Shimadzu)

• Simulation of stress fields and mechanical parameters using FilmDoctor® software (SIO – Saxonian Institute of Surface Mechanics)

Typical applications

• Comparative evaluation of scratch resistance of substrate surfaces and coatings in the automotive, glasses and precision optics fields
• Development and testing of suitable testing procedures
• Simulation and structural analysis in layer development