Fraunhofer Institute for Applied Optics and Precision Engineering IOF
Fraunhofer Institute for Applied Optics and Precision Engineering IOF

Annual Reports 2000 to 2010

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Scientific contributions in the annual report

Design of optical components for single-mode high-power lasers

Contact: Dr. Thomas Peschel

High speed-high resolution sensor for conductor board inspection

Contact: Dr. Christian Bräuer-Burchardt, Dr. Peter Kühmstedt

Organic UV-protection coatings for polycarbonate glazing

Contact: Christian Präfke

High repetition rate few-cycle pulse generation for high-field physics

Contact: Prof. Dr. Jens Limpert

3D photonics for astronomical interferometry

Contact: Dr. Stefano Minardi, Prof. Dr. Thomas Pertsch

Coating of large substrates for precision optics

Contact: Dr. Mark Schürmann

THz-tomography for the spatial identification of chemical substances

Contact: Dr. Gunther Notni, M. Eng. Anika Brahm

Metal fluoride and oxide evaporation with fluorine gas for UV coatings

Contact: Dipl.-Phys. Dieter Gäbler

Lifetime of EUV optics

Contact: Dr. Sergiy Yulin

Ultra-thin camera with VGA resolution

Contact: Dr. Frank Wippermann

Freeform prism for head-mounted display

Contact: Dr. Peter Schreiber

Angular selective diffusion panel

Contact: Dr. Ernst-Bernhard Kley

Chip in the Tip – Ultra compact camera for endoscopy with VGA resolution

Contact: Dr. Erik Beckert

Ultra-thin microscope

Contact: Dr. Frank Wippermann

Multilevel micro-optical modules

Contact: Dr. Peter Dannberg

Local welding using ultrashort laser pulses

Contact: Prof. Dr. Stefan Nolte

Suppression of stimulated Raman scattering in DC fiber amplifiers

Contact: Prof. Dr. Jens Limpert

Direct Bonding: a "new" technology for glass assembly

Contact: Dr. Gerhard Kalkowski

Freeform manufacturing of microoptics on curved surfaces

Contact: Dipl.-Ing. Sebastian Scheiding, Dr. Ramona Eberhardt

Table top system for R, T, and light scatter measurement – ALBATROSS-TT

Contact: Dr. Angela Duparré

Antireflective coatings on sapphire

Contact: Christoph Gödeker

Novel gratings for laser applications

Contact: Dr. Frank Fuchs, Dr. habil. Uwe Detlef Zeitner

Laserstructuring of poly- and monocrystalline diamond tools

Contact: Dipl.-Phys. Andreas Joswig, Dr. Ramona Eberhardt

Surface nanostructure assessment using light scattering techniques

Contact: Dr. Angela Duparré

Plasma and optical technologies (PluTO)

Contact: Dr. Olaf Stenzel

Plasmonic resonant nanorings

Contact: Dr. Ernst-Bernhard Kley

2010

Selected scientific results, publications and highlights in 2010

Scientific contributions in the annual report

Ultra-precise metal mirrors for a novel rotary telescope

Contact: Dr.-Ing. Stefan Risse

LEDs for measurement and testing technology

Contact: Dr. Peter Schreiber

Roughness structures for resource-conserving wetting properties

Contact: Dr. Angela Duparré

Nanostructured SIS solar cells

Contact: Kevin Füchsel

Ultra-short pulse laser with 830 W average power

Contact Prof. Jens Limpert

Ultra-compact imaging system with increased sensitivity

Contact: Dipl.-Phys. Andreas Brückner

Ultra-slim array projection optics

Contact: Dr. Peter Schreiber

Plastic web with antireflective properties by plasma etching - POLAR

Contact: Dr. Ulrike Schulz

Collector mirrors for EUV lithography

Contact: Dr. Torsten Feigl

Parallel SPR-based biosensor technology

Contact: Dr. Norbert Danz

Optical hand-held 3D scanner for individual respiratory masks

Contact: Dr. Peter Kühmstedt

Soldering of hermetically sealed windows for biomedical devices

Contact: Thomas Burkhardt

Broadband dieletric front-surface mirrors for medical applications

Contact: Dipl.-Ing. (FH) Wieland Stöckl

Spectrometer grating for the Gaia space mission

Contact: Dr. Uwe Detlef Zeitner

Multi deflection arrays for "Multi Shaped Beam Litography"

Contact: Dipl.-Ing. Matthias Mohaupt

Ultra-precise mirror assemblies with well-defined reference structure

Contact: Sebastian Scheiding

High-power components for fiber laser

Ccntact: Dr. Thomas Schreiber

Computational manufacturing for design- and process optimization

Contact: Dr. Steffen Wilbrandt

Timing-jitter reduction in passivly Q-switched microchip lasers

Contact: Prof. Jens Limpert

Integrated Bragg reflectors for high-power fiber lasers

Contact: Prof. Stefan Nolte

Polarization-insensitive optical metamaterials

Contact: Prof. Thomas Pertsch

Computer-generated holograms based on nanostructures

Contact: Dr. Ernst-Bernhard Kley

Publication list

Scientific publications

Books - Magazines - Invited papers - Lectures, Posters, Conferences

2009

Selected scientific results, publications and highlights in 2009

Scientific contributions in the annual report

2 kW incoherent beam combining of four narrow-linewidth photonic crystal fiber amplifiers

Contact: Christian Wirth

Peak power enhancement of ultra-short pulse laser sources based on nonlinear interaction

Contact: Prof. Dr. Jens Limpert

Optic production – quality control by the optical 3D multi sensor system ”kolibri MULTI lens“

Contact: Dr. Peter Kühmstedt

A gripper for rotational alignment of polarization-maintaining glass fiber

Contact: Andreas Kamm

Improvement of the beam profile of lasers by resonator internal beam shaping

Contact: Hans-Christoph Eckstein

Nanoporous oxide optical coatings with optimized mechanical and optical properties

Contact: Dr. Olaf Stenzel

Compact IR sensor for detecting the direction of light signals

Contact: Dr. Martin Palme

Tailored light emission from OLEDs

Contact: Dr. Dirk Michaelis

Polarizing metal stripe gratings

Contact: Thomas Weber

Metal mirrors with excellent surface and roughness

Contact: Ralf Steinkopf

IR beam splitter for the LUCIFER instrument

Contact: Gerd Harnisch

Multipole approach to optical metamaterials

Contact: Jörg Petschulat

Antireflection structures AR-plas®

Contact: Dr. Ulrike Schulz

Low temperature deposition of indium tin oxide

Contact: Kevin Füchsel

Microscopy in the “water window”

Contact: Dr. Sergiy Yulin

Surface defect analysis by Makyoh imaging

Contact: Alexander von Finck

THz imaging – from the component to the complete system

Contact: Boris Pradarutti

LED street lighting

Contact: Sergey Kudaev

Compact roughness sensor

Contact: Dr. Sven Schröder

Ultra-compact vision sensor for automotive applications

Contact: Andreas Brückner

Mask chucks for EUV lithography

Contact: Dr. Gerhard Kalkowski

Device for alignment of ceramic green tapes

Contact: Matthias Mohaupt

Publication list

Scientific publications

Books - Magazines - Invited papers - Lectures, Posters, Conferences

2008

Selected scientific results, publications and highlights in 2008

Scientific contributions in the annual report

Microoptics for LED light sources

Contact: Dr. Peter Schreiber

Single point diamond turning of freeform mirrors

Contact: Ralf Steinkopf

Organic LED – light extraction and light management

Contact: Dr. Norbert Danz

Chirped microlens arrays for the homogenization of coherent radiation

Contact: Dr. Frank Wippermann

Computer generated holograms

Contact: Dr. Uwe Detlef Zeitner

fs-laser written fiber Bragg gratings for integrated fiber lasers

Contact: Prof. Dr. Stefan Nolte

Optical microresonators

Contact: Prof. Dr. Thomas Pertsch

3D structuring of lithium niobate

Contact: Dr. Ernst-Bernhard Kley

High-reflectance EUV/soft X-ray multilayer mirrors

Contact: Dr. Sergiy Yulin

High-temperature LPP collector mirror for EUV lithography

Contact: Dr. Torsten Feigl

High reflective coatings for polymer optical components

Contact: Dr. Peter Munzert

Sputtered mirror coatings for optics and lighting technology

Contact: Wieland Stöckl

Plasma-ion assisted deposition of interference coatings with online error compensation

Contact: Dr. Olaf Stenzel

An accommodating opto-mechanical eye model to describe the propagation of fs-laser pulses inside the eye

Contact: Dr. Stefan Riehmann

Solder Bumping – a new and flexible packaging technology for optoelectronic systems

Contact: Dr. Erik Beckert

Compact pickup-optic for mobile blue-ray-data storage systems – assembly concept

Contact: Matthias Mohaupt

Wetting analysis on micro- and nanostructured surfaces

Contact: Marcel Flemming

Lens centering – key technology for the assembly of high precision optics

Contact: Andreas Gebhardt

Chucks for EUV lithography and AFM analysis

Contact: Dr. Gerhard Kalkowski

Image processing for a thin compound-eye sensor

Contact: Andreas Brückner

ns-fiber laser for micro-processing of materials

Contact: Christian Wirth

1 mJ ultra-short pulse fiber amplifier with high average power

Contact: Prof. Dr. Jens Limpert

Next generation light scattering techniques enter new application area

Contact: Dr. Angela Duparré

Intraoral 3D scanner for CAD/CAM in dentistry

Contact: Dr. Peter Kühmstedt

THz imaging system with line detection

Contact: Dr. Stefan Riehmann

Test laboratory for fingerprint scanner

Contact: Dr. Stefan Riehmann

Publication list

Scientific publications

Books - Magazines - Invited papers - Lectures, Posters, Conferences

2007

Selected scientific results, publications and highlights in 2007.

Scientific contributions in the annual report

High-sensitive determination of optical losses in synthetic fused silica for 193 nm immersion lithography

Contact: Dr. Sven Schröder

A sharp view into outer space – Ultra precise metal mirrors for astronomic and space applications

Contact: Dr. Stefan Risse

Ultra precision machining – Technology for innovative optical elements

Contact: Ralf Steinkopf

Strategies for in-process nanoroughness control using light scattering techniques

Contact: Dr. Angela Duparré

High-adherent coatings on PMMA – from process development to industrial application

Contact: Dr. Ulrike Schulz

Stereo based fringe projection – 3D digitization systems for industrial applications

Contact: Christoph Munkelt

Visual stimulation system for deployment in magneto-encephalography

Contact: Uwe Lippmann

Production of micro-optical components and systems

Contact: Dr. Ramona Eberhardt

Near infrared camera for the Skinakas-Observatory

Contact: Dr. Thomas Peschel

Phaseshifters for the DARWIN-Mission

Contact: Gerd Harnisch

Ion-traps for quantum computers of the future

Contact: Claudia Bruchmann

Next generation lithography for micro-optics

Contact: Dr. Uwe Detlef Zeitner

Glass molding as technology for micro- and nano-optics

Contact: Dr. Peter Dannberg

Artificial compound eye for color vision

Contact: Andreas Brückner

Miniaturized laser projectors

Contact: Dr. Andreas Bräuer

Opto- and thermo-mechanical design of high power fiber lasers

Contact: Dr. Thomas Peschel

Applications of optimized THz systems

Contact: Boris Pradarutti

Laser beam soldered fiber coupling assembly for UV-applications

Contact: Henrik Banse

Metamaterials with negative refraction index for overcoming the Abbe limit

Contact: Prof. Dr. Thomas Pertsch

Propagation of light in femtosecond laser written waveguides

Contact: Alexander Szameit

Latest developments in the field for coatings for optical instrumentation

Contact: Prof. Dr. Norbert Kaiser

Thin film optics beyond the homogeneous and isotropic layer model

Contact: Dr. Olaf Stenzel

Capping layers for EUV lithography optics

Contact: Dr. Sergiy Yulin

Publication list

Scientific publications

Books - Magazines - Invited papers - Lectures, Posters, Conferences

2006

Selected scientific results, publications and highlights in 2006

Scientific contributions in the annual report

Improving the resolution-homogeneity of ultra-thin vision systems based on artificial compound eyes

Contact: Jaques Duparré

Complex micro-optical modules generated by lithography and UV-molding

Contact: Dr. Peter Dannberg

Automatic handling of hairs for measuring geometrical and mechanical properties

Contact: Matthias Mohaupt

EUV multilayer optics

Contact: Dr. Torsten Feigl

Ultra-planar electrostatic chucks for next generation lithographies

Contact: Dr. Gerhard Kalkowski

Chirped arrays of micro-lenses by reflow of photoresist

Contact: Dr. Frank Wippermann

Color picture generation by RGB-holograms

Contact: Dr. Ernst-Bernhard Kley

Photonic crystal based optical imaging elements

Contact: Markus Augustin

Fiber Laser – Microstructures open new possibilities

Contact: Prof. Dr. Jens Limpert

System technical basics for THz imaging systems

Contact: Boris Pradarutti

Application of OLED microdisplays in visual stimulation systems and in metrology

Contact: Uwe Lippmann

New approaches for presbyopia treatment with ultra-short laser pulse

Contact: Prof. Dr. Stefan Nolte

Optics for ultra-short laser pulses – analysis, design und fabrication

Contact: Ulrike Fuchs

Coatings for ultra-short-time optics

Contact: Dr. Martin Bischoff

Omnidirectional antireflective coatings based on graded-index film

Contact: Dr. Robert Leitel

Transparent scratch-resistance for polymer optical components

Contact: Dr. Ulrike Schulz

Scatter measurement techniques for gratings and diamond turned surfaces

Contact: Stefan Gliech

3D dental digitizer “hiScanμ” – the third generation of devices

Contact: Dr. Peter Kühmstedt

FEM-simulation of the laser beam soldering process for joining optical components

Contact: Henrik Banse

Optoelectronics for health care applications

Contact: Dr. Erik Beckert

PCR-on-a-chip – An innovative tool to speed up in life sciences

Contact: Claudia Gärtner

Publication list

Scientific publications

Books - Magazines - Invited papers - Lectures, Posters, Conferences

2005

Selected scientific results, publications and highlights in 2005

Scientific contributions in the annual report

Lotus effect, kohlrabi leaf, motheye ? Nanostructure design for ultra-hydrophobic surface

Contact: Dr. Angela Duparré

Plastic wafer technology for parallel generation of miniaturized optical systems

Contact: Dr. Peter Dannberg

Small bars, large effects – Miniaturized deflection system for lithography equipment

Contact: Dr. Stefan Risse

Ultra-thin vision system based on artificial compound eyes

Contact: Jaques Duparré

Concentrators for high-power LEDs

Contact: Dr. Peter Schreiber

Laser-lithography for micro-optics on curved surfaces

Contact: Dr. Uwe-Detlef Zeitner

Micro-materials processing using ultrashort laser pulses

Contact: Prof. Dr. Stefan Nolte

Fiber lasers – Novel light sources in research and industry

Contact: Holger Zellmer

Light weight mirrors for fast Lidar-Scanners

Contact: Christoph Damm

Microassembly of a grating slit for astronomical spectroscopy

Contact: Dr. Erik Beckert

“NANO-motheye” antireflection structures on acrylic polymers

Contact: Dr. Ulrike Schulz

Precise control of coatings and surface structures

Contact: Dr. Steffen Wilbrandt

Scattering losses on fluoride substrates and coatings at 193 nm

Contact: Dr. Sven Schröder

Development of high-temperature MoSi2/Si and Mo/C/Si/C multilayer mirrors

Contact: Dr. Sergiy Yulin

Optical simulation of a radiation heating

Contact: Dr. Martin Palme

“Kolibri 1500” – a device system for founding piece inspection

Contact: Dr. Peter Kühmstedt

From Microfluidic Toolbox to a flexible Diagnostic Platform

Contact: Dr. Claudia Gärtner

Publication list

Scientific publications

Books - Magazines - Invited papers - Lectures, Posters, Conferences

2004

Selected scientific results, publications and highlights in 2004.

Scientific contributions in the annual report

Embossing of glass-ceramics (LTCC) for optical and opto-electronic applications

Contact: Wolfgang Buß

The microfluidic toolbox – Standardization Concepts and Fluidic Interfaces

Contact: Dr. Claudia Gärtner

Flexible phasogrammetry – a new method for whole body 3-D measurement

Contact: Dr. Peter Kühmstedt

Mechanics and Optics united – long time archival storage of colored pictures on microfilms

Contact: Dr. Stefan Risse

Diamond turning of micro-optical structures

Contact: Andreas Gebhardt

Development of a large area sputtering system for EUV optics

Contact: Dr.Thorsten Feigl

Coatings for micro-mirror arrays

Contact: Alexandre Gatto

Rugate filters for the near infrared and visible spectral regions

Contact: Dr. Olaf Stenzel

AR-hard® – coating with adjustable spectral bandwidth for plastic optic

Contact: Dr. Ulrike Schulz

Tailoring Guided Modes in Waveguide Arrays

Contact: Dr. Dirk Michaelis

Hybrid Integration of optical Systems on miniaturized ceramic Substrates

Contact: Dr. Erik Beckert

Electrostatic chuck with integrated wafer lift

Contact: Dr. Gerhard Kalkowski

Metrology for Nanotechnologies

Contact: Marcel Flemming

High-sensitivity light scattering analysis of optical components from the VUV to IR

Contact: Stefan Gliech

Miniaturized labelfree detection system

Contact: Dr. Bürk Schäfer

Optical microphone

Contact: Dr. Peter Schreiber

Dome projector

Contact: Dr. Stefan Riehemann

High power fiber and waveguide lasers

Contact: Prof. Dr. Andreas Tünnermann

Publication list

Scientific publications

Books - Magazines - Invited papers - Lectures, Posters, Conferences

2003

Selected scientific results, publications and highlights in 2003.

Scientific contributions in the annual report

Visual inspection vs. laser measurement: a crucial link for the assessment of nanostructured functional surfaces

Contact: Marcel Flemming

System for angle-resolved and total-light scattering, transmittance and reflectance measurements at 157 nm and 193 nm

Contact: Stefan Gliech

Theoretical and experimental investigations into self-acting air bearings

Contact: Dr. Stefan Risse

Modulated RGB-laser source for digital photo finishing

Contact: Dr. Peter Schreiber

Microoptical illumination module for digital projection applications

Contact: Dr. Uwe Detlef Zeitner

Pattern formation in UV-cured polymers

Contact: Ulrich Streppel

Handling of microoptical components for micro-assembly

Contact: Dr. Erik Beckert

Laser beam soldering of micro-optical components

Contact: Henrik Banse

Optimization of planar fluorescence biosensors

Contact: Dr. Norbert Danz

Finite element analysis of opto-mechanical assemblies

Contact: Dr. Thomas Peschel

Measurement capability of an optical 3-D measurement

Contact: Dr. Peter Kühmstedt

Digital slit-lamps using micordisplays

Contact: Dr. Stefan Riehemann

Polymer microfluidic components for life science applications

Contact: Dr. Claudia Gärtner

A developmental breakthrough in EUV-Lithography

Contact: Dr. Sergiy Yulin

Polymers in plasma-assisted coating processes

Contact: Dr. Ulrike Schulz

Surface plasmon excitation in thin solid films

Contact: Dr. Olaf Stenzel

Publication list

Scientific publications

Books - Magazines - Invited papers - Lectures, Posters, Conferences

2002

Selected scientific results, publications and highlights in 2002.

Scientific contributions in the annual report

Design and characterization of optical coatings with enhanced roughness for ultra-hydrophobic, low scatter applications

Contact: Dr. Angela Duparré

Precise adjustment of mechanical and optical components by linear stroke actuators

Contact: C. Siebenhaar

Light scattering measurements on optical components at 157 nm and 193 nm

Contact: J. Steinert

Microoptical sensor for online characterization of textile fibers

Contact: Dr. Uwe Detlef Zeitner

Micro optical elements fabricated by RIE proportional transfer

Contact: Andre Lothar Matthes

Mechanical design of a miniaturized UV-VIS spectrometer for space applications

Contact: Dr. Thomas Peschel

Anomalous light propagation and diffraction control in waveguide arrays

Contact: Prof. Dr. Thomas Pertsch

Adjustment robot for fibre optics assemblies

Contact: V. Guyenot

Precision chucks for future lithography

Contact: Dr. Gerhard Kalkowski

Optical 3-D scanning of extraoral defects using »kolibri-mobile«

Contact: Dr. Gunther Notni

High speed 3-D digitizer for CAD-CAM in industrial and dental applications

Contact: Dr. Peter Kühmstedt

Application of microdisplays in optical metrology

Contact: Dr. Stefan Riehemann

Radiation resistant VUV coatings for Excimer- and Free Electron Lasers

Contact: J. Heber

New multilayer coatings for EUV optics

Contact: T. Kuhlmann

Novel design for antireflection coatings

Contact: Dr. Ulrike Schulz

Publication list

Scientific publications

Books - Magazines - Invited papers - Lectures, Posters, Conferences

2001

Selected scientific results, publications and highlights in 2001.

Scientific contributions in the annual report

Percutaneous transvascular aortic valve replacement with a self-expanding stent-valve device

Contact: M. Ferrari

Optical coatings for soft x-ray applications

Contact: Dr. Sergiy Yulin

Hard UV coatings for free electron laser

Contact: A. Gatto

Abrasion resistant antireflection coatings for plastic optics

Contact: Dr. Ulrike Schulz

Coating of new polymers for optical applications

Contact: Dr. Peter Munzert

Substrates and optical coatings for 157 nm applications

Contact: J. Heber

Light scattering measurement with 157 nm techniques

Contact: Dr. Angela Duparré

Electrostatic chucks for vacuum lithography

Contact: Dr. Gerhard Kalkowski

Wafer stage assembly for Ion Projection Lithography

Contact: Christoph Damm

Miniaturized bulk-optical Mach-Zehnder filter for optical code division multiplexing

Contact: Dr. Peter Schreiber

Novel multilayer waveguide technology for optical fan-out structures

Contact: U. Streppel

Integration of microoptics on wafers with vertical emitting lasers

Contact: G. Mann

Selfcalibrating 360-deg shape-measurement systems

Contact: Dr. Gunther Notni

Correction of 3-D coordinates using consistence check

Contact: Dr. Peter Kühmstedt

Publication list

Scientific publications

Books - Magazines - Invited papers - Lectures, Posters, Conferences

2000

Selected scientific results, publications and highlights in 2000