Fraunhofer Institute for Applied Optics and Precision Engineering IOF
High-vacuum evaporation systems (ion-assisted electron beam evaporation, thermal boat evaporation)
- substrate diameters up to 100 mm
- materials: metals, metal oxides, metal fluorides, organic materials
Magnetron sputtering systems (including reactive sputtering)
- substrate diameters up to 650 mm
- materials: metals, metal oxides, indium tin oxide (ITO) layers, alloys (solder alloys), EUV multilayers
Atomic Layer Deposition tools
- thermal and plasma enhanced ALD
- substrate diameters up to 330 mm
- materials: oxides, metals, tailored composites
Selected coating system
Coating system PRECICOAT – magnetron sputtering for precision optics