Scientific publications

Effect of an electric field during the deposition of silicon dioxide thin films by plasma enhanced atomic layer deposition: An experimental and computational study
V. Beladiya, M. Becker, T. Faraz, W. M. M. Kessels, P. Schenk, F. Otto, T. Fritz, M. Gruenewald, C. Helbing, K. D. Jandt, A. Tünnermann, M. Sierka, A. Szeghalmi /
2020, Nanoscale, 12(3), pp. 2089-2102.
https://doi.org/10.1039/c9nr07202k

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CARS-imaging guidance for fs-laser ablation precision surgery
T. Meyer, R. Ackermann, R. Kammel, M. Schmitt, S. Nolte, A. Tünnermann, J. Popp /
2019, Analyst, 144, 7310-7317
https://doi.org/10.1039/C9AN01545K

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Pattern projection in the short-wave infrared (SWIR): accurate, eye-safe 3D shape measurement
S. Heist, M. Landmann, M. Steglich, Y. Zhang, P. Kühmstedt, G. Notni /
2019, Proceedings Volume 10991, Dimensional Optical Metrology and Inspection for Practical Applications VIII; 109910J (2019)
https://doi.org/10.1117/12.2518205

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Plasma-activated direct bonding of coated optical glasses
P. Birckigt, C. Rothhardt, K. Grabowski, K. Jorke, R. Schlegel, F. Dreisow, G. Kalkowski, S. Risse, R. Eberhardt /
2019, 2019 6th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)
https://doi.org/10.23919/LTB-3D.2019.8735181

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