Photolithography, Laser beam lithography, Functional material printing, Stochastic structures for antireflection, Electron beam lithography, UV molding, Combination of lithography, dry etching and molding, Technologies for producing molding tools
Coating devices, Design of optical layer systems, EUV- and X-ray multilayers, VUV-, NIR- and VIS-layers, Plastic coating, Transparent and conductible coatings, Stochastic structures for antireflection