Researcher from Jena awarded Hugo Geiger Award for the development of compact high-power EUV source / 2023
Full EUV power on laboratory scale

The future has a color: it is extreme ultraviolet (EUV). With the help of light in this particularly short-wave spectral range, so-called EUV light, it is possible, for example, to produce smaller and more powerful microchips than ever before. But further research faces a problem: Experiments with laser-like EUV light can usually only be conducted at expensive large-scale research facilities. Jena scientist Robert Klas wants to change that. He has developed a compact EUV laser module that can be used to generate this special light much more cost-effectively. Potential applications are possible in semiconductor manufacturing and microscopy. Robert Klas has now been awarded the Hugo Geiger Award for his work.
more info