Micro- and Nanooptics

We develop micro- and nanostructured optical elements with uncompromising precision for the most demanding photonic applications. Using lithographic processes such as grayscale and electron beam lithography, we develop and manufacture metasurfaces, diffraction gratings, CGHs and microlens arrays with nanometer precision on the wafer scale up to 300 mm. Replication techniques complement production for larger quantities. Our portfolio also includes active photonic integrated circuits (PICs) for quantum technology and telecommunications.

Our Range of Services

We find and implement the optimum solution for complex tasks for our clients

  • Process development and transfer for the largest and most precise nanophotonic components for the entire electromagnetic spectrum from the EUV to the deep IR
  • Development, production and characterization of nanophotonic components and instruments for your application
  • Meta surfaces, grids and CGHs with extreme requirements for precision, efficiency, size and durability
  • Diffractive solutions for use in harsh environments
  • Development and prototyping of next-generation active photonic circuits
  • Micro-optical solutions for next-generation lighting and imaging processes

 

 

Our Products and Technologies

 

Active Photonic Integrated Circuits:

Active photonic integrated circuits (PICs) use light for data processing and enable optical data transmission in the terabit age, integrated sensor technology, miniaturized quantum technology, and AI-inspired computing at the limit of what is physically possible.

 

Grating Technologies for Photonics and Spectroscopy:

Diffractive gratings enable applications in spectroscopy and laser technology. Our gratings combine extreme precision, maximum efficiency, huge bandwidth, and the largest area for your application where every photon counts.

 

Microlensarrays:

Microlensarrays consist of countless microscopic optical systems that individually shape and direct light. They are used in optics, sensor technology and displays, e.g. for collimation, homogenization or 3D image display.

 

Diffusers:

Diffusers with customized surface profiles scatter light in angular distributions according to your specifications: light made to measure, information where it is needed.

 

Computer Generated Holograms:

Development and production of computer-generated holograms with extreme precision down to the nanometer scale. Measure aspheres and freeforms metrically referenced and with integrated alignment features.

 

Metastructures:

Development and production of sub-wavelength structures for optical applications - tailor-made metastructures for versatile applications in which all degrees of freedom of light can be addressed: from polarization to spectrum to angular spectrum.

 

Technology Chain:

The technology chain for micro- and nanostructure production includes electron beam and photolithography, etching technologies, replication and measurement technology for substrates up to 300 mm in size.

 

Our Extensive Competencies and Expertise

CO2M

The Fraunhofer IOF plays a key role in the ESA CO2M mission, which is part of the Copernicus program. Its satellites are flying spectrometers that enable the global measurement of CO2 emissions. We develop and manufacture the optical heart of the instruments: the spectrometric dispersers, which have been specially developed for use in space. These consist of two prisms and a grating, which are connected using a direct bonding process. The nanostructured gratings are characterized by an exceptionally high efficiency of over 90 % and a low degree of polarization. This is achieved through a unique grating design in which the grating trenches are filled with a highly refractive material. This precision technology minimizes stray light and optimizes the spectrometer's signal-to-noise ratio. With this groundbreaking development, IOF is making a decisive contribution to better understanding climate change and enabling more effective measures.

© Fraunhofer IOF
CO2M PG+P Disperser SWIR2

FORUM

© Fraunhofer IOF
FORUM Diamond Beam Splitter

As part of the ESA mission FORUM (Far-infrared Outgoing Radiation Understanding and Monitoring), the Fraunhofer IOF has developed a key technology to analyze the Earth's thermal radiation balance in the far-infrared range (8 to 100 µm). At the center is a microstructured diamond beam splitter, which is ideal for this application due to its exceptional properties such as high transmission over a broad wavelength spectrum. The microstructures on the surface of the diamond enable broadband antireflection coating, which is essential for the precise functioning of the spectrometer on board the satellite. These structures were created using state-of-the-art technologies and are in the nanometre range in order to minimize reflections and maximize the efficiency of the measurements. The development of this technology, which has been supported by ESA since 2019, represents a significant advance in the processing of diamond and makes a decisive contribution to improving climate research

Sentinel

The Fraunhofer IOF is involved in numerous missions of the Sentinel program, which is part of the European Copernicus program for earth observation. The program provides the most precise data for climate research, weather forecasting and land and ocean observation worldwide.

One example is the development of a high-precision spectrometer grating for the near-infrared channel (685-773 nm) of the Sentinel-5 satellite. This grating was specially developed for measuring trace gas concentrations such as ozone, nitrogen dioxide and methane. Highest diffraction efficiency and low polarization dependence ensure the most accurate measurement results.

© Fraunhofer IOF
Sentinel-4 NIR-grating

GAIA

© Fraunhofer IOF
Microstructure of the GAIA transmission grid.

From 2013-2025, the GAIA space probe was on its way to map several billion stars in the Milky Way with unprecedented accuracy using astrometry, photometry and spectroscopy. The result was the most precise and comprehensive star atlas that humans have ever had at their disposal. With the help of this scientific machine, astronomers were not only able to improve models of our solar system in more than 10,000 scientific papers, but also revolutionize our understanding of the origin and development of our home galaxy. On board is a spectrometer for measuring the so-called redshift. This is used to determine the direction and speed of movement of stars. One component of the spectrometer is a Fraunhofer IOF nano-optical grating with outstanding properties.

Fraunhofer IOF developed and built the high-precision RVS spectrometer grating for GAIA, which plays a central role in measuring the speed of movement of stars. The grating is based on an innovative nanostructure that enables light to be diffracted with maximum efficiency and precision. The structure consists of binary meta-atoms whose lateral dimensions are below the wavelength of light.

The grating was made of silica glass and produced using high-resolution electron beam lithography and reactive ion etching processes. The grating period is 3.1 µm, and the usable area measures 205 mm x 155 mm. With a wavefront error of less than 8 nm RMS and a high diffraction efficiency, it was crucial for the success of the mission. As a metastructure grating is probably the most productive metasurface ever made by humans.

ELT M2

The Fraunhofer IOF has developed a high-precision computer-generated hologram (CGH) for the Extremely Large Telescope (ELT), which is used to measure the world's largest convex mirror, the 4.2-meter M2 mirror. The CGH was produced on a quartz glass substrate using electron beam lithography and achieves an exceptional wavefront accuracy of just 5.34 nm (RMS). Only this precision enables the exact testing and optimization of the mirror surface, without which the telescope would not work. With this technology, the IOF is making an important contribution to the realization of the largest telescope for the visible and infrared spectral range.

© Fraunhofer IOF
Final CGH with a manufacturing-related wavefront error of only 5,34 nm (RMS).

Phoquant

© Fraunhofer IOF
Modulator network for quantum optical applications made of thin lithium niobate film on insulator (LNOI) with fiber optic and electronic connections

In the PhoQuant project, Fraunhofer IOF is developing photonic quantum computer chips that use light particles (photons) as qubits. At the heart of this technology is a waveguide chip made of lithium niobate (LNOI), which is equipped with Mach-Zehnder interferometers. These enable the precise control and modulation of light signals. They are manufactured using scalable semiconductor production technologies, which makes it possible to integrate many computing units on a single chip. The aim of the project is to create a new photonic computer architecture that supports industrial applications such as research into new materials.

 

Markets and Applications for Micro- and Nanooptics

 

Are:

  • Aerospace
  • Mobility and Automotive
  • Consumer Electronics
  • Quantum Communication, Computing and Imaging
  • Design and Lighting
  • Optical Sensor Systems and Remote Sensing
  • Defense and Security
  • Industrial Production
  • Laser Technology
  • Science and Astronomy

Do you have any questions about our services? We will be happy to talk to you!

In a personal meeting, we will advise you on our (individual) range of services and our core competencies. Get in touch with us.

Are you interested in a cooperation? Get in touch with us!

We develop special and visionary solutions - tailored to the needs and wishes of our customers. Let's talk about your idea(s).

 

Would you like to work with us?
Then send us your application!

We are always on the lookout for creative minds and committed people who will work with us to develop innovative solutions with light. Visit our job portal or send us an unsolicited application: