Fraunhofer Institute for Applied Optics and Precision Engineering IOFWe specialize in the production of the smallest structures on large substrates. Thanks to state-of-the-art electron beam technology with pattern projection, we produce a wide variety of structures in the sub-wavelength range on substrates with a diameter of up to 300 mm. Whether you need many smaller areas for subsequent separation or a closed, large-area structure, we offer customized solutions that are perfectly tailored to your requirements. Benefit from our comprehensive process chain and our expertise in precision manufacturing.
Metastructures
Your partner for maximum precision on substrates up to 300 mm in diameter
Contact us and we will find a solution that is possible for you and our production. We look forward to new challenges and are constantly expanding our portfolio.
Our Services and Competencies
Beam splitter
Beam splitters generate dot patterns that are required in various applications such as calibration or face recognition. Different structures are used - from rectangular dot arrangements to random distributions. We offer solutions that are precisely tailored to your requirements and can implement continuous or binary structures as needed. Let us advise you individually and you will receive exactly what you need for your project from the replication master, demonstrator or small series.
SEM image of a binary beam splitter structure
Structured anti-reflective coating
SEM image of an AR structure in diamond
For broadband antireflection coatings in the wavelength range 6.5 to 100 µm, the use of classic coating systems is no longer possible. However, with structured surfaces in synthetic diamond, which are inspired by moth-eye structures, efficient antireflection coating can still be achieved.
Further Information: Annual Report 2024, page 20-21 (Forum)
Meta Master
Fraunhofer IOF offers the world's largest meta-optics with a diameter of 300 mm. This is based on nanostructures that enable precise light guidance. This replaces conventional optical components with highly developed, nanostructured materials that act as an effective medium. This opens up a wide range of possibilities in light manipulation, ideal for highly specialized and innovative applications in research and industry.
The first metasurface with a diameter of 30 cm
was realized at the Fraunhofer IOF (for comparison, a one-euro coin).
Electron beam
microscope image of the meta grating. The grating consists of
a lateral sequence of customized nano structures.
Meta Lenses
Fraunhofer IOF uses electron beam lithography to produce high-precision nanostructures for metal lenses. This technology enables the production of complex phase profiles with the highest resolution - ideal for meta-optics in the visible and near-infrared spectral range. These high-performance metal lenses are used in imaging, sensor and quantum technologies.
SEM image of a meta lens made of columns
SEM image of a meta lens made of holes
SEM image of polarisation-sensitive structures
Your Benefits in Working with Us
We offer you comprehensive support from the design phase through to production. With a wide range of manufacturing technologies, we can advise you individually to find the optimum solution for your product.
Our Research Strength
- »Largest Meta-Optics Worldwide«
(Annual Report 2023, Page 24-25)
Datasheets
