Fraunhofer Institute for Applied Optics and Precision Engineering IOFOur expertise covers the entire process chain of photolithography and electron beam lithography - from structuring and subsequent etching steps through to precise measurement technology. In addition, we offer a sophisticated replication technology with which the structures created can be efficiently reproduced.
Technology Chain of Micro- and Nanostructuring
From Idea to Structure: Complete Solutions for Micro- and Nanotechnology
