Complex microoptic modules


The wafer-scale fabrication of hybrid integrated micro-optic modules for illumination, beam shaping, sensors and display applications generated by lithography, UV-molding, coating and separation is the objective.


Technological approach

  • Stacking of optical functional surfaces / wafers
  • UV molding of microoptical elements
  • Metal and dielectrical coating
  • Lithographical patterning of apertures, filters, or metal gratings