Micromachining

Motivation

Micromachining provides a more flexible manufacturing of microparts with a much wider choise of materials. The manufacturing is done by using the classic cutting techniques of milling, drilling and turning, as well as microtools made of carbid or profiled diamond-tools. Production-oriented design of micro modules and appropriate selection of materials are the basis for mechanical manufacturing and structuring of small parts in high qualtity. Therefore microcutting permits a rapid way from the concept to the prototype.

Small parts for microassemby

• Assembly platforms, magazines
• Gripper for microprisms, microlenses, fibres
• Adjusting and assembly devices
• Mounts for microoptics

Microstructures made of machinable glass ceramic

• Microholes, holearrays (minimal diameter: 30 µm)
• Grooves, deepenings (minimal width: 100 µm)
• Free of burrs, stable
• Capable for vacuum environments, continuous use temperature: 800 °C
• Examples:
• hole structures to position and assemble optical fibres
• fluidic systems
• precisely structured coating masks