The advantages of ALD are:
- conformal thin film growth on nano/ microstructured substrates such as gratings,
porous membranes or on substrates with a complex shape such as lenses, fibers, half-dome, etc. - tailored material properties by composite materials and nanolaminates
- sub-nanometer precision thickness control
- low surface roughness
- high uniformity
We offer a wide range of materials and carry out custom material development upon request:
- Organic or hybrid organic-inorganic MLD coatings (molecular layer deposition)
- Composite materials with tailored composition and properties
- Oxides (TiO2, Ta2O5, HfO2, Al2O3, SiO2)
- Nanoporous oxides (SiO2, Al2O3)
- Doping of thin films
- Nanolaminates
- Metals (Ir, Ru)
- Nitrides