Atomic Layer Deposition for Optical Coatings

Atomic layer deposition (ALD) is a powerful coating technology based on self-limited surface reactions of chemical precursors.

Schema of ALD coatings on balls or lenses
Schema of ALD coatings on fibers
Schema of ALD coatings on fibers

The advantages of ALD are:

  • conformal thin film growth on nano/ microstructured substrates such as gratings,
    porous membranes or on substrates with a complex shape such as lenses, fibers, half-dome, etc.
  • tailored material properties by composite materials and nanolaminates
  • sub-nanometer precision thickness control
  • low surface roughness
  • high uniformity

We offer a wide range of materials and carry out custom material development upon request:

  • Organic or hybrid organic-inorganic MLD coatings (molecular layer deposition)
  • Composite materials with tailored composition and properties
  • Oxides (TiO2, Ta2O5, HfO2, Al2O3, SiO2)
  • Nanoporous oxides (SiO2, Al2O3)
  • Doping of thin films
  • Nanolaminates
  • Metals (Ir, Ru)
  • Nitrides
Conformal TiO₂ ALD coating on a grating substrate

Additionally we have several characterization and material treatment capabilities including:

  • Spectrophotometry, ellipsometry, XRR, XRD, AFM, SEM, etc.
  • Thermal stability and annealing
  • Chemical stability and wet chemical etching
  • Handling substrates under inert atmosphere for moisture sensitive substrates
Iridium wire grid polarizer by ALD
Ta₂O₅ / Al₂O₃ nanolaminate

We can support your applications by applying functional ALD coatings for:

  • interference coating systems such as bandpass filters, beam splitters, polarisers, mirrors etc.
  • antireflective coatings
  • X-ray optics
  • photonic crystals
  • polarizers
  • diffractive optical elements
  • high efficiency transmission or reflection gratings
  • guided mode resonance gratings (resonant waveguides)
  • filling grooves of nanostructured materials
  • biocompatible or antibacterial surfaces
  • hydrophobic or hydrophilic coatings
  • barrier and protective coatings
  • diffusion membranes
  • encapsulation, coating fibres, metamaterials, sensors etc.


Your substrate & our coating
Make the difference!