Mask based polymer-waveguide-elements

Technology

By coating (e.g. spinning on) and exposure by a mask with subsequent development process, waveguide components can be directly written into UV-curable polymers.

Preferred materials are anorganic-organic hybrid polymers, synthesized at Fraunhofer ISC in Würzburg.

• The production is simple and exclusively carried out with photolithography devices and process steps, typically on 4” wafer size
• Single-mode and multi-mode
• Refractive index variation with co-polymerization
• Very good planarizing properties
• Stacking of waveguide layers is possible
• Thermo-optical components
• Low losses in wavelengths from 1.3 µm and 1.55 µm

 

Examples

• Passive components such as 1 X N and N X M distributors in various configurations
• Waveguide arrays for basic research
• 3D waveguide fan-out element as optical HF summator
• Biosensors on the basis of surface plasmon excitation in multimode strip waveguides
• Integration of waveguide structures with microoptics
• Thermo-optical switch with low cross talk

 

Services

• Mask layout and production in accordance with design, adapted to technological requirements
• Production of components
• Development of processes and technology transfer
• Characterization and in-process measurements
• Material selection and characterization
• Investigations on stability of optical properties for special fields of application