Mechanical properties of thin films

High abrasion resistance and low stresses are key quality characteristics of thin layers. Comprehensive characterization of these properties is required to optimize the manufacturing process.



  • Stress testing of single layers on Si wafers, glasses and thin plastic substrates, also in relation to temperature using TENCOR® FLX2320
  • Testing for scratch and abrasion resistance using the following methods:
  • ABREX® chemical mechanical abrasion testing (e.g. DIN EN 60068-2-70 / IEC 68-2-70)
  • Eraser test in accordance with ISO 9211-4
  • Scanning scratch test with SST101 (Shimadzu)
  • Simulation of stress fields and mechanical parameters using FilmDoctor® software (SIO – Saxonian Institute of Surface Mechanics)


Typical applications

  • Comparative evaluation of scratch resistance of substrate surfaces and coatings in the automotive, glasses and precision optics fields
  • Development and testing of suitable testing procedures
  • Simulation and structural analysis in layer development