Investigation of a superpolished glass surface by scanning probe microscopy

Equipment for Optics Characterization

  • MTF-measurement (modulation transfer function)
  • Light source metrology in near- and far field
  • Characterization of micro-displays
  • Determination of focal length
  • Mode spectroscopy
  • Absorption- and waveguide attenuation measurement
  • Determination of thermo-optical coefficient
  • Determination of refraction index distribution (RNF)
  • Shearing-interferometry
  • Auto-focus microscope for shape measurement
  • Interference microscope for measurement of layer thickness
  • Precision goniometer