Precision Engineering Components and Systems

The Fraunhofer IOF develops precision engineering and micro system technology systems. Focal areas of research and development are design and simulation, manufacture and assembly as well as characterization and testing of optics and precision engineering assemblies. Here, elements from technical optics and mechanics, materials science and joining technology, metrology and software development are used. Modern CAD systems (ProEngineer) and FEM workstations (ANSYS), ultra-precise diamond processing machines and micro processing centers, optical and mechanical measuring and testing devices, bonding and welding equipment and positioning and adjustment elements are available at the institute.

The work carried out includes basic analysis, modern technology development, construction and testing of demonstrators and prototypes, all the way to the production of equipment and special-purpose machines.
At the present time, development work is being conducted in the following areas:

 

Equipment for lithography

Precision engineering and optical components and systems are developed at Fraunhofer IOF for the next generation of lithography technologies...
 

Development of gas bearings and guideways

Air bearings and gas guideways for special application cases are developed at Fraunhofer IOF. Aerostatic and aerodynamic components enable precise...
 

Drive and motion systems

High-precision applications in lithography and metrology increasingly demand the precise positioning of substrates such as wafers or masks...
 

Molding tools

By using diamond processing, ultra-precise molding tools for plastic and glass replication are produced at Fraunhofer IOF. Depending on the application...
 

Construction of special-purpose machines

High-end optics such as photographic lenses, microscopes or inspection optics by globally known brand-name manufacturers are the epitome...

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